|
Standard Spring
Feather Touch
Vacuum |
A6G/1/S
--
-- |
A6G/1/SH
--
-- |
AX/0.25/S
--
-- |
AX/0.25/SH
--
-- |
AX/0.5/S
--
-- |
AX/0.5/SH
--
-- |
AX/1/S
AT/1/S
AX/1/V |
AX/1/SH
AT/1/SH
AX/1/VH |
AX5/1/S
--
-- |
AX5/1SH
--
-- |
AX/1.5/S
AT/1.5/S
AX/1.5/V |
AX/1.5/SH
AT/1.5/SH
AX/1.5/VH |
AX/2.5/S
AT/2.5/S
AX/2.5/V |
AX/2.5/SH
AT/2.5/SH
AX/2.5/VH |
AX/5/S
AT/5/S
AX/5/V |
AX/5/SH
AT/5/SH
AX/5/VH |
AX/10/S
AT/10/S
AX/10/V |
AX/10/SH
AT/10/SH
AX/10/VH |
|
Accuracy (1)
Resolution (2)
Repeatability (µm)
Pre - travel (mm)
Post - travel
Pre-travel Adjustment (mm)Tip
force:Standard/Vacuum
@ mid position
Tip force: Feather touch
@ mid position
Temp. Coeffficient%FS/°C |
0.5, 1µm
0.15
0.15
0.35
None
0.7
0.3
0.02 |
0.5, 1µm
0.15
0.15
0.35
None
0.7
0.3
0.02 |
0.5, 0.5µm
0.1
0.03
0.05
None
0.7
0.3
3 |
0.5, 0.5µm
0.1
0.03
0.05
None
0.7
0.3
0.03 |
0.5, 1µm
0.15
0.15
0.35
0.5
0.7
0.3
0.03 |
0.5, 1µm
0.15
0.15
0.35
0.5
0.7
0.3
0.03 |
0.5, 1µm
0.15
0.15
0.35
1
0.7
0.3
0.01 |
0.5, 1µm
0.15
0.15
0.35
1
0.7
0.3
0.01 |
0.5, 1µm
0.15
0.15
0.85
None
0.7
0.3
0.01 |
0.5, 1µm
0.15
0.15
0.8
None
0.7
0.3
0.01 |
0.5, 1.5µm
0.15
0.15
0.8
1.5
0.7
0.3
0.01 |
0.5, 1.5µm
0.15
0.15
0.8
1.5
0.7
0.3
0.01 |
0.5, 2.5µm
0.15
0.15
0.8
1.5
0.7
0.3
0.01 |
0.5, 2.5µm
0.15
0.15
0.8
1.5
0.7
0.3
0.01 |
0.5, 5µm
0.15
0.15
0.8
1.5
0.7
0.3
0.01 |
0.5, 5µm
0.15
0.15
0.8
1.5
0.7
0.3
0.01 |
0.7, 10µm
0.15
0.15
0.8
None
0.7
0.3
0.01 |
0.7, 10µm
0.15
0.15
0.8
None
0.7
0.3
0.01 |